III-V semiconductors epitaxy (summer/fall 2025)
- High-purity, 2 inch system
- Source configuration 2xGa, 2xAl, In, As, Sb, Bi, Si, C.
- Topological insulators, 2DEGs, optical devices.
Metal epitaxy: ferromagnetic materials and superconductors (already installed)
- Superconductors: Al, Nb, …
- Ferromagnets: Co, Fe, …
- Barrier materials: MgO
- Gates: Pt, Ni
- Equipped with a mask station for localized deposition.
- Cooling plate for low-T deposition
